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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Influence of gas composition and the mask materials on the etch profile of dry-etched structures in silicon
Schwesinger, Norbert, Hotovy, Ivan, Saendig, Torsten, Pelzus, Alexander, Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251236
File:
PDF, 557 KB
english, 1996