SPIE Proceedings [SPIE 17th Annual BACUS Photomask Technology and Management - Redwood City, CA (Wednesday 17 September 1997)] 17th Annual BACUS Symposium on Photomask Technology and Management - On the way to 1 Gb: demonstration of e-beam proximity effect correction for mask making
Rosenbusch, Anja, Kalus, Christian K., Endo, Hiroyuki, Kimura, Yasuki, Endo, Akihiro, Reynolds, James A., Grenon, Brian J.Volume:
3236
Year:
1998
Language:
english
DOI:
10.1117/12.284027
File:
PDF, 682 KB
english, 1998