SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Tuesday 13 May 1997)] Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997 - Optical study on microstructure of laser-deposited Si-containing films
Svechnikov, Sergey V., Kaganovich, E. B., Manoilov, E. G., Kudryavtsev, A. A., Indutnyi, Ivan Z., Svechnikov, Sergey V., Valakh, Mikhail Y.Volume:
3359
Year:
1998
Language:
english
DOI:
10.1117/12.306192
File:
PDF, 275 KB
english, 1998