![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - CMOS resonant sensors
Brand, Oliver, Hornung, Mark, Lange, Dirk, Baltes, Henry, French, Patrick J., Chau, Kevin H.Volume:
3514
Year:
1998
Language:
english
DOI:
10.1117/12.323895
File:
PDF, 4.29 MB
english, 1998