SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Probe-type microforce sensor for microactuators
Onoe, Yasushi, Tanaami, Takeo, Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324088
File:
PDF, 1.96 MB
english, 1998