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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining Technology for Micro-Optics - Fabrication technologies for micro-optical elements with arbitrary surfaces
Schilling, Andreas, Nussbaum, Philippe, Philipoussis, Irene, Herzig, Hans Peter, Stauffer, Laurent, Rossi, Markus, Kley, Ernst-Bernhard, Lee, Sing H., Johnson, Eric G.Volume:
4179
Year:
2000
Language:
english
DOI:
10.1117/12.395692
File:
PDF, 1.68 MB
english, 2000