SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Acoustic agitation for enhanced development of LIGA PMMA resists
Nilson, Robert H., Griffiths, Stewart K., Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396462
File:
PDF, 382 KB
english, 2000