SPIE Proceedings [SPIE Micromachining and Microfabrication...

  • Main
  • SPIE Proceedings [SPIE Micromachining...

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Acoustic agitation for enhanced development of LIGA PMMA resists

Nilson, Robert H., Griffiths, Stewart K., Karam, Jean Michel, Yasaitis, John A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396462
File:
PDF, 382 KB
english, 2000
Conversion to is in progress
Conversion to is failed