SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Process Control and Diagnostics - Corrective actions for stainless-steel-particle-related burn-in failures
Sacedon, Ana, Inarrea, Jesus, Alvarez, Manuel, Prieto, Pilar, Plaza, Jose C., Hernandez, Jose L., Martinez, Carlos, Fernandez, Salvador, Dominguez, Pablo S., Gonzalez, Jose P., Larran, Manuel, Mata, CVolume:
4182
Year:
2000
Language:
english
DOI:
10.1117/12.410078
File:
PDF, 886 KB
english, 2000