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SPIE Proceedings [SPIE Symposium on Integrated Optics - San Jose, CA (Saturday 20 January 2001)] Diffractive and Holographic Technologies for Integrated Photonic Systems - Multilevel nanoscale DOE optimization, fabrication, and replication
Prather, Dennis W., Pustai, David, LeCompte, Marion R., Shi, Shouyuan, Sutherland, Richard L., Prather, Dennis W., Cindrich, IvanVolume:
4291
Year:
2001
Language:
english
DOI:
10.1117/12.424854
File:
PDF, 727 KB
english, 2001