![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Heterogeneous substrates for high-temperature and optical applications
Reiche, Manfred, Dragoi, V., Alexe, M., Goesele, Ulrich M., Thallner, Erich, Schaefer, Ch., Lindner, F. P., Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425327
File:
PDF, 566 KB
english, 2001