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SPIE Proceedings [SPIE Workshop on Nanostructure Science, Metrology, and Technology - Gaithersburg, MD (Wednesday 5 September 2001)] Nanostructure Science, Metrology, and Technology - New methods for fabricating step and flash imprint lithography templates
Resnick, Douglas J., Bailey, Todd C., Mancini, David P., Nordquist, Kevin J., Dauksher, William J., Ainley, Eric S., Talin, A., Gehoski, Kathleen A., Baker, Jeff H., Choi, Byung J., Johnson, Stephen CVolume:
4608
Year:
2002
Language:
english
DOI:
10.1117/12.437269
File:
PDF, 500 KB
english, 2002