SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MOEMS and Miniaturized Systems II - Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides
Bakke, Thor, Tigges, Chris P., Sullivan, Charles T., Motamedi, M. Edward, Goering, RolfVolume:
4561
Year:
2001
DOI:
10.1117/12.443078
File:
PDF, 264 KB
2001