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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Lithographic and Micromachining Techniques for Optical Component Fabrication - Minimizing Fizeau fringes during the contact printing of diffraction gratings
Ciarlo, Dino R., Rushford, Michael C., Kuzmenko, Paul J., Ge, Jian, Kley, Ernst-Bernhard, Herzig, Hans PeterVolume:
4440
Year:
2001
Language:
english
DOI:
10.1117/12.448041
File:
PDF, 228 KB
english, 2001