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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Lithographic and Micromachining Techniques for Optical Component Fabrication II - Process development and application of grayscale lithography for efficient three-dimensionally profiled fiber-to-waveguide couplers
Dillon, Thomas, Sure, Anita, Murakowski, Janusz A., Prather, Dennis W., Kley, Ernst-Bernhard, Herzig, Hans PeterVolume:
5183
Year:
2003
Language:
english
DOI:
10.1117/12.505834
File:
PDF, 429 KB
english, 2003