SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Sub-wavelength grid patterns on silicon surface by pulsed CO2 laser irradiation
Wang, Wei-Jie, Tan, M. F., Hong, Ming Hui, Chong, Tow Chong, Miyamoto, Isamu, Ostendorf, Andreas, Sugioka, Koji, Helvajian, HenryVolume:
5063
Year:
2003
Language:
english
DOI:
10.1117/12.540537
File:
PDF, 273 KB
english, 2003