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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Industrial and Commercial Applications of Smart Structures Technologies - Active membrane masks for improved overlay performance in proximity lithography
Huston, Dryver R., Anderson, Eric H., Plumpton, James, Esser, Brian, Sullivan, Gerald A.Volume:
5388
Year:
2004
Language:
english
DOI:
10.1117/12.546598
File:
PDF, 603 KB
english, 2004