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SPIE Proceedings [SPIE Optics East - Philadelphia, PA (Monday 25 October 2004)] Optomechatronic Micro/Nano Components, Devices, and Systems - Variable optical attenuator using linear micro-actuators
Oohira, Fumikazu, Matsui, Takashi, Hosogi, Maho, Iino, Akihiro, Katagiri, YoshitadaVolume:
5604
Year:
2004
Language:
english
DOI:
10.1117/12.570627
File:
PDF, 269 KB
english, 2004