![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2005 - San Jose, California, United States (Saturday 22 January 2005)] Optical Components and Materials II - Simulation and fabrication of amorphous silicon rib-type arrayed waveguide grating
Liu, Wen-Jen, Jiang, Shibin, Digonnet, Michel J., Cheng, Yen-Hsin, Chen, Steven, Lai, I-Tsen, Lai, Yin-Chieh, Weng, Min-Hang, Shih, Yung-Hui, Lee, Chung-DaVolume:
5723
Year:
2005
Language:
english
DOI:
10.1117/12.590065
File:
PDF, 636 KB
english, 2005