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SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Analysis of various blur effects on mask CD distortion
Han, Hak-Seung, Weed, J. Tracy, Martin, Patrick M., Lee, Sang-Hee, Kim, Byung-Gook, Moon, Seong-Yong, Choi, Sung Woon, Han, Woo-SungVolume:
5992
Year:
2005
Language:
english
DOI:
10.1117/12.632268
File:
PDF, 319 KB
english, 2005