SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] MEMS, MOEMS, and Micromachining II - New generation of fully integrated optical microscopes on-chip: application to confocal microscope
Bargiel, Sylwester, Ürey, Hakan, El-Fatatry, Ayman, Nieradko, Lukasz, Józwik, Michal, Gorecki, Christophe, Dziuban, Jan A.Volume:
6186
Year:
2006
Language:
english
DOI:
10.1117/12.663770
File:
PDF, 1.48 MB
english, 2006