SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Measurement of surface details with nanometer resolution using several optically held probes
Jákl, Petr, Šerý, Mojmír, Liška, Miroslav, Zemánek, Pavel, Tománek, Pavel, Hrabovský, Miroslav, Miler, Miroslav, Senderákova, DagmarYear:
2012
Language:
english
DOI:
10.1117/12.675862
File:
PDF, 574 KB
english, 2012