SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Interferometry XIII: Techniques and Analysis - Fast surface profiling using monochromatic phase and fringe order in white-light interferometry
Tung, Chi-Hong, Huang, Chiung-Huei, Kao, Ching-Fen, Chang, Calvin C.Volume:
6292
Year:
2006
Language:
english
DOI:
10.1117/12.678899
File:
PDF, 532 KB
english, 2006