SPIE Proceedings [SPIE European Mask and Lithography Conf 2007 - Grenoble, France (Monday 22 January 2007)] 23rd European Mask and Lithography Conference - Contact angles and liquid loss behavior of high index fluids
Harder, Paul M., Shedd, Timothy A.Volume:
6533
Year:
2007
Language:
english
DOI:
10.1117/12.734338
File:
PDF, 2.52 MB
english, 2007