SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Fast and accurate laser bandwidth modeling of optical proximity effects
Lalovic, Ivan, Naber, Robert J., Kawahira, Hiroichi, Kritsun, Oleg, Bendik, Joeseph, Smith, Mark, Sallee, Chris, Farrar, NigelVolume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.746594
File:
PDF, 312 KB
english, 2007