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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - Checking design conformance and optimizing manufacturability using automated double patterning decomposition
Cork, Chris, Singh, Vivek K., Rieger, Michael L., Ward, Brian, Barnes, Levi, Painter, Ben, Lucas, Kevin, Luk-Pat, Gerry, Wiaux, Vincent, Verhaegen, Staf, Maenhoudt, MireilleVolume:
6925
Year:
2008
Language:
english
DOI:
10.1117/12.774647
File:
PDF, 450 KB
english, 2008