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SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and testing technologies: Optical test and Measurement Technology and Equipment - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - Research on the measuring method of the slope error of EUV/x-ray optical elements and measuring apparatus of long trace profiler
Xue, Changxi, Pan, Junhua, Wyant, James C., Huo, Furong, Zhou, Chengzhi, Wang, Hexin, Deng, WeicaiVolume:
6723
Year:
2007
Language:
english
DOI:
10.1117/12.783209
File:
PDF, 303 KB
english, 2007