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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - White light interferometry for vertical artifact calibration
Damian, V., Bojan, Mihaela, Sima, A., Cristea, Dana, Dinescu, A., Muller, Raluca, Udrea, MirceaYear:
2012
Language:
english
DOI:
10.1117/12.801969
File:
PDF, 326 KB
english, 2012