SPIE Proceedings [SPIE Smart Materials, Nano-and Micro-Smart Systems - Melbourne, Australia (Tuesday 9 December 2008)] Smart Structures, Devices, and Systems IV - A novel multi-actuation CMOS RF MEMS switch
Al-Sarawi, Said F., Lee, Chiung-I, Ko, Chih-Hsiang, Varadan, Vijay K., Weste, Neil, Huang, Tsun-Che, Kalantar-Zadeh, KouroshVolume:
7268
Year:
2008
Language:
english
DOI:
10.1117/12.810564
File:
PDF, 460 KB
english, 2008