SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Design for Manufacturability through Design-Process Integration III - Verification of extraction repeating pattern efficiency from many actual device data
Singh, Vivek K., Shoji, Masahiro, Inoue, Tadao, Rieger, Michael L., Yamabe, MasakiVolume:
7275
Year:
2009
Language:
english
DOI:
10.1117/12.811965
File:
PDF, 220 KB
english, 2009