SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Design for Manufacturability through Design-Process Integration III - Exploration of complex metal 2D design rules using inverse lithography
Chang, Simon, Singh, Vivek K., Rieger, Michael L., Blatchford, James, Prins, Steve, Jessen, Scott, Dam, Thuc, Xiao, Guangming, Pang, Linyong, Gleason, BobVolume:
7275
Year:
2009
Language:
english
DOI:
10.1117/12.814197
File:
PDF, 1.13 MB
english, 2009