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SPIE Proceedings [SPIE 4th International Symposium on Advanced Optical Manufacturing and testing technologies: Optical Test and Measurement Technology and Equipment - Chengdu, China (Wednesday 19 November 2008)] 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - Quantitative characterization of supersmooth surface with roughness in the sub-nanometer range
Shen, Zhenxiang, Zhang, Yudong, Wyant, James C., Wang, Zhanshan, Ma, Bin, Smythe, Robert A., Wang, Hexin, Wang, Li, Ji, Yiqin, Liu, HuasongVolume:
7283
Year:
2008
Language:
english
DOI:
10.1117/12.828590
File:
PDF, 919 KB
english, 2008