SPIE Proceedings [SPIE 1984 Los Angeles Techincal Symposium - Los Angeles (Tuesday 24 January 1984)] Advanced Semiconductor Processing/Characterization of Electronic/Optical Materials - The Characteristics Of Oxidation Of Polycrystalline Silicon Films In VLSI
Yang-yuan, Wang, Ai-zhen, Zhang, Lampert, Carl M., Sadana, Devindra K.Volume:
463
Year:
1984
Language:
english
DOI:
10.1117/12.941361
File:
PDF, 2.14 MB
english, 1984