SPIE Proceedings [SPIE 1985 Los Angeles Technical Symposium - Los Angeles (Monday 21 January 1985)] Advanced Applications of Ion Implantation - The Influence Of Ion Implantation On Solid Phase Epitaxy Of Amorphous Silicon Deposited By LPCVD
yang-yuan, Wang, Cheung, N. W., Sadana, D. K., Jou, C., Strathman, M., Current, Michael I., Sadana, Devindra K.Volume:
530
Year:
1985
Language:
english
DOI:
10.1117/12.946469
File:
PDF, 4.66 MB
english, 1985