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SPIE Proceedings [SPIE 1988 Intl Congress on Optical Science and Engineering - Hamburg, Germany (Monday 19 September 1988)] In-Process Optical Measurements - In-Process Control Of Specific Thin Film Properties In Large Scale Dc-Reactive Sputtering Machines
Muller, Sabine, Brauer, Gunter, Dicken, Wilfried, SchultheiB, Eberhard, Wirz, Peter, Spring, Kenneth H.Volume:
1012
Year:
1989
Language:
english
DOI:
10.1117/12.949326
File:
PDF, 698 KB
english, 1989