Multi-Objective Prediction Model and Parameter Optimization...

Journal of Computational and Theoretical Nanoscience 2013 / 09 Vol. 10; Iss. 9

Multi-Objective Prediction Model and Parameter Optimization Model for the Sputtering of Aluminum Zinc Oxide Semiconducting Transparent Thin Films

Yang, Ching-Been, Chiang, Hsiu-Lu, Hsu, Chun-Yao
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Volume:
10
Language:
english
Journal:
Journal of Computational and Theoretical Nanoscience
DOI:
10.1166/jctn.2013.3168
Date:
September, 2013
File:
PDF, 347 KB
english, 2013
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