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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 2 February 2013)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII - Investigation of a reliable all-laser scribing process in thin film Cu(In,Ga)(S,Se) 2 manufacturing
Witte, Reiner, Frei, Bruno, Schneeberger, Stefan, Bücheler, Stephan, Nishiwaki, Shiro, Burn, Andreas, Muralt, Martin, Romano, Valerio, Krainer, Lukas, Xu, Xianfan, Hennig, Guido, Nakata, Yoshiki, RothVolume:
8607
Year:
2013
Language:
english
DOI:
10.1117/12.2003872
File:
PDF, 2.84 MB
english, 2013