SPIE Proceedings [SPIE 29th European Mask and Lithography...

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SPIE Proceedings [SPIE 29th European Mask and Lithography Conference - Dresden, Germany (Tuesday 25 June 2013)] 29th European Mask and Lithography Conference - Actinic characterization and modeling of the EUV mask stack

Philipsen, Vicky, Hendrickx, Eric, Jonckheere, Rik, Davydova, Natalia, Fliervoet, Timon, Neumann, Jens Timo, Behringer, Uwe F. W., Maurer, Wilhelm
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Volume:
8886
Year:
2013
Language:
english
DOI:
10.1117/12.2030663
File:
PDF, 1.91 MB
english, 2013
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