SPIE Proceedings [SPIE 29th European Mask and Lithography Conference - Dresden, Germany (Tuesday 25 June 2013)] 29th European Mask and Lithography Conference - Actinic characterization and modeling of the EUV mask stack
Philipsen, Vicky, Hendrickx, Eric, Jonckheere, Rik, Davydova, Natalia, Fliervoet, Timon, Neumann, Jens Timo, Behringer, Uwe F. W., Maurer, WilhelmVolume:
8886
Year:
2013
Language:
english
DOI:
10.1117/12.2030663
File:
PDF, 1.91 MB
english, 2013