SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachined Devices and Components - Finite element modeling microelectromechanical structures for sensing applications

Stewart, James T., Roop, Ray M., Chau, Kevin H.
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Volume:
2642
Year:
1995
Language:
english
DOI:
10.1117/12.221169
File:
PDF, 484 KB
english, 1995
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