SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachined Devices and Components - Finite element modeling microelectromechanical structures for sensing applications
Stewart, James T., Roop, Ray M., Chau, Kevin H.Volume:
2642
Year:
1995
Language:
english
DOI:
10.1117/12.221169
File:
PDF, 484 KB
english, 1995