SPIE Proceedings [SPIE Microelectronic Manufacturing '95 -...

  • Main
  • SPIE Proceedings [SPIE Microelectronic...

SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II - Evaluation of near-surface microdefects in Czochralski-Si wafers after a CMOS process by an infrared interference method

Kitagawara, Yutaka, Aihara, Ken-ichi, Oka, Satoshi, Takenaka, Takao, Lowell, John K., Chen, Ray T., Mathur, Jagdish P.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
2638
Year:
1995
Language:
english
DOI:
10.1117/12.221204
File:
PDF, 385 KB
english, 1995
Conversion to is in progress
Conversion to is failed