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SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Lasers as Tools for Manufacturing of Durable Goods and Microelectronics - UV FEL light source for industrial processing
Kelley, Michael J., Dylla, H. Frederick, Neil, George R., Brillson, Leonard J., Henkel, Daniel P., Helvajian, Henry, Dubowski, Jan J., Mazumder, Jyotirmoy, Migliore, Leonard R., Roychoudhuri, ChandrasVolume:
2703
Year:
1996
Language:
english
DOI:
10.1117/12.237725
File:
PDF, 521 KB
english, 1996