![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Fabrication of LIGA mold inserts using a modified procedure
Galhotra, Vikas, Marques, Christophe, Desta, Yohannes M., Kelly, Kevin W., Despa, Mircea S., Pendse, Ajit, Collier, John R., Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251204
File:
PDF, 486 KB
english, 1996