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SPIE Proceedings [SPIE XII Conference on Solid State Crystals: Materials Science and Applications - Zakopane, Poland (Monday 7 October 1996)] Solid State Crystals in Optoelectronics and Semiconductor Technology - Optical and electrical tests of uniformity of rf PCVD carbon coatings
Langer, Malgorzata, Niedzielski, Piotr, Rogalski, Antoni, Rutkowski, Jaroslaw, Majchrowski, Andrzej, Zielinski, JerzyVolume:
3179
Year:
1997
Language:
english
DOI:
10.1117/12.276201
File:
PDF, 105 KB
english, 1997