SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Wet chemical isotropic etching procedures of silicon: a possibility for the production of deep-structured microcomponents
Schwesinger, Norbert, Albrecht, Arne, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
Language:
english
DOI:
10.1117/12.284467
File:
PDF, 1.26 MB
english, 1997