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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Microcomposite electroforming for MEMS technology
Yeh, Shinn-Horng, Liue, Chun-Ying, Wang, Ji-Weng, Chou, Min-Chieh, Hou, Shu-Ling, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
Language:
english
DOI:
10.1117/12.284468
File:
PDF, 1.02 MB
english, 1997