![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - Excimer laser micromachining system for the production of bioparticle electromanipulation devices
Rizvi, Nadeem H., Harvey, Erol C., Rumsby, Phil T., Burt, Julian P., Talary, Mark S., Tame, John A., Pethig, Ron, Chau, Kevin H., French, Patrick J.Volume:
3224
Year:
1997
DOI:
10.1117/12.284525
File:
PDF, 1.26 MB
1997