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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Strategy to determine the constant of elasticity for static micromechanical structures with given shape
Ilie, Mihaela, Liess, Hans-Dieter, Moldovan, Nicolae, Meister, Veit, Nedelcu, Sorin, Vasile, Eugen, Vitriuc, Aurel, Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324087
File:
PDF, 844 KB
english, 1998