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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - Control and modeling of stress in multistacked polysilicon films considering oxidation effect
Lee, Chang S., Jang, Won-Ick, Choi, Chang-Auck, Hong, Yoonshik, Lee, Jong-Hyun, No, Kwangsoo, Wee, Dang M., Smith, James H.Volume:
3511
Year:
1998
Language:
english
DOI:
10.1117/12.324316
File:
PDF, 798 KB
english, 1998