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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane
Hong, Yoonshik, Lee, Jong-Hyun, Lee, Chang S., Jang, Won-Ick, Choi, Chang-Auck, Kim, Soo Hyun, Kwak, Yoon Keun, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean MiVolume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341161
File:
PDF, 1.86 MB
english, 1999