SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - Resonance measurements of stresses in Al/Si3N4 microribbons
Payne, Alexander P., Staker, Bryan P., Gudeman, Christopher S., Daneman, Michael J., Peter, Donald E., Lawton, Russell A., Miller, William M., Lin, Gisela, Ramesham, RajeshuniVolume:
3880
Year:
1999
Language:
english
DOI:
10.1117/12.359358
File:
PDF, 534 KB
english, 1999