SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V - Oxide chemical mechanical polishing closed-loop time control
Luetzen, Joern, Pal, Shapna, Gonzales, Simon, Bar, Yuval, Toprac, Anthony J., Dang, KimVolume:
3882
Year:
1999
Language:
english
DOI:
10.1117/12.361305
File:
PDF, 1.44 MB
english, 1999